Granted Patent
Utility
US 5,873,938 · App. 08/774,183
Single crystal pulling apparatus
Inventors:
Takashi Atami, Hisashi Furuya, Michio Kida
Patented Case
View Patent ↗
Granted: Feb 23, 1999
Filed: Dec 26, 1996
Inventors
Takashi Atami
Hisashi Furuya
Michio Kida
Assignees (at issue)
Mitsubishi Materials Silicon Corp.
MITSUBISHI MATERIALS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.