Granted Patent
Utility
US 5,891,205 · App. 08/911,076
Chemical mechanical polishing composition
Inventors:
S. Charles Picardi, Mitch Mircea Tanase
Patented Case
View Patent ↗
Granted: Apr 6, 1999
Filed: Aug 14, 1997
Inventors
S. Charles Picardi
Mitch Mircea Tanase
Assignee (at issue)
EKC Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.