Granted Patent
Utility
US 5,891,234 · App. 08/619,086
Spin on glass material and method for forming a semiconductor device by using improved spin on glass material
Inventors:
Kenichi Koyanagi, Koji Kishimoto, Tetsuya Homma
Patented Case
View Patent ↗
Granted: Apr 6, 1999
Filed: Mar 21, 1996
Inventors
Kenichi Koyanagi
Koji Kishimoto
Tetsuya Homma
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.