Granted Patent
Utility
US 5,895,737 · App. 09/023,407
Method for adjusting an illumination field based on selected reticle feature
Inventors:
Andrew W. McCullough, Pradeep K. Govil
Patented Case
View Patent ↗
Granted: Apr 20, 1999
Filed: Feb 12, 1998
Inventors
Andrew W. McCullough
Pradeep K. Govil
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.