IP Library › Granted Patent US 5,896,188
Granted Patent Utility
US 5,896,188 · App. 08/835,653

Reduction of pattern noise in scanning lithographic system illuminators

Inventor: Andrew W. McCullough
Patented Case View Patent ↗
Granted: Apr 20, 1999 Filed: Apr 10, 1997
Inventor
Andrew W. McCullough
Assignee (at issue)
SVG Lithography Systems, Inc.

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Quick Facts
Patent No.
US 5,896,188
App. No.
08/835,653
Filed
1997-04-10
Granted
1999-04-20
Kind
A