Granted Patent
Utility
US 5,896,877 · App. 08/971,754
Support for wafer-like objects
Inventor:
Willibald Pirker
Patented Case
View Patent ↗
Granted: Apr 27, 1999
Filed: Nov 17, 1997
Inventor
Willibald Pirker
Assignee (at issue)
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.