Granted Patent
Utility
US 5,897,377 · App. 08/934,759
Semiconductor device manufacturing method with use of gas including acyl-group-containing compound
Inventor:
Kouji Suzuki
Patented Case
View Patent ↗
Granted: Apr 27, 1999
Filed: Sep 22, 1997
Inventor
Kouji Suzuki
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.