IP Library Granted Patent US 5,897,706
Granted Patent Utility
US 5,897,706 · App. 08/834,293

Methods for crucible attachment to support base of single crystal pulling apparatus and support base assembly apparatus and support base employed therein

Inventors: Masakazu Yamazaki, Michio Yanaba, Hiroaki Taguchi, Takashi Atami, Hisashi Furuya
Patented Case View Patent ↗
Granted: Apr 27, 1999 Filed: Apr 15, 1997
Inventors
Masakazu Yamazaki
Michio Yanaba
Hiroaki Taguchi
Takashi Atami
Hisashi Furuya
Assignees (at issue)
Mitsubishi Materials Silicon Corp.
MITSUBISHI MATERIALS CORPORATION

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Quick Facts
Patent No.
US 5,897,706
App. No.
08/834,293
Filed
1997-04-15
Granted
1999-04-27
Kind
A