Granted Patent
Utility
US 5,904,164 · App. 09/080,236
Arrangement for treatment of wafer-shaped articles, particularly silicon wafers
Inventors:
Gerald Wagner, Helmut Frey
Patented Case
View Patent ↗
Granted: May 18, 1999
Filed: May 18, 1998
Inventors
Gerald Wagner
Helmut Frey
Assignee (at issue)
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.