Granted Patent
Utility
US 5,905,626 · App. 09/058,734
Electrostatic chuck with ceramic pole protection
Inventors:
Joseph S. Logan, Robert E. Tompkins
Patented Case
View Patent ↗
Granted: May 18, 1999
Filed: Apr 12, 1998
Inventors
Joseph S. Logan
Robert E. Tompkins
Assignee (at issue)
Dorsey Gage Co., Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.