Granted Patent
Utility
US 5,913,980 · App. 08/831,606
Method for removing complex oxide film growth on silicon crystal
Inventor:
Balakrishnan R. Bathey
Patented Case
View Patent ↗
Granted: Jun 22, 1999
Filed: Apr 10, 1997
Inventor
Balakrishnan R. Bathey
Assignee (at issue)
Ebara Solar, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.