Granted Patent
Utility
US 5,916,011 · App. 08/780,113
Process for polishing a semiconductor device substrate
Inventors:
Sung-Cheol Kim, Rajeev Bajaj, Mark A. Zaleski
Patented Case
View Patent ↗
Granted: Jun 29, 1999
Filed: Dec 26, 1996
Inventors
Sung-Cheol Kim
Rajeev Bajaj
Mark A. Zaleski
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.