Granted Patent
Utility
US 5,917,186 · App. 08/925,976
Focused ion beam optical axis adjustment method and focused ion beam apparatus
Inventors:
Toshiaki Fujii, Yasuhiko Sugiyama
Patented Case
View Patent ↗
Granted: Jun 29, 1999
Filed: Sep 9, 1997
Inventors
Toshiaki Fujii
Yasuhiko Sugiyama
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.