Granted Patent
Utility
US 5,919,605 · App. 08/626,238
Semiconductor substrate exposure method
Inventor:
Takayuki Uchiyama
Patented Case
View Patent ↗
Granted: Jul 6, 1999
Filed: Mar 29, 1996
Inventor
Takayuki Uchiyama
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.