Granted Patent
Utility
US 5,920,396 · App. 08/730,787
Line width insensitive wafer target detection
Inventors:
Louis John Markoya, Joseph Lyons
Patented Case
View Patent ↗
Granted: Jul 6, 1999
Filed: Oct 16, 1996
Inventors
Louis John Markoya
Joseph Lyons
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.