Granted Patent
Utility
US 5,930,673 · App. 08/418,122
Method for forming a metal contact
Inventors:
Fusen Chen, Fu-Tai Liou, Yih-Shung Lin, Girish Dixit, Che-Chia Wei
Patented Case
View Patent ↗
Granted: Jul 27, 1999
Filed: Apr 6, 1995
Inventors
Fusen Chen
Fu-Tai Liou
Yih-Shung Lin
Girish Dixit
Che-Chia Wei
Assignee (at issue)
STMICROELECTRONICS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.