Granted Patent
Utility
US 5,931,518 · App. 09/093,187
Gripper for wafer-shaped articles
Inventor:
Willibald Pirker
Patented Case
View Patent ↗
Granted: Aug 3, 1999
Filed: Jun 8, 1998
Inventor
Willibald Pirker
Assignee (at issue)
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.