Granted Patent
Utility
US 5,931,662 · App. 09/029,398
Silicon single crystal wafer annealing method and equipment and silicon single crystal wafer and manufacturing method related thereto
Inventors:
Naoshi Adachi, Takehiro Hisatomi, Masakazu Sano
Patented Case
View Patent ↗
Granted: Aug 3, 1999
Filed: Mar 12, 1998
Inventors
Naoshi Adachi
Takehiro Hisatomi
Masakazu Sano
Assignee (at issue)
Sumitomo Sitix Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.