IP Library › Granted Patent US 5,942,032
Granted Patent Utility
US 5,942,032 · App. 08/904,943

Heat shield assembly and method of growing vacancy rich single crystal silicon

Inventors: Kyong-Min Kim, William L. Luter, Lee William Ferry, Robert J. Braun, Srdjan Ilic, Mauro Diodà, Paolo Tosi, Marco Gobbo, Umberto Martini
Patented Case View Patent ↗
Granted: Aug 24, 1999 Filed: Aug 1, 1997
Inventors
Kyong-Min Kim
William L. Luter
Lee William Ferry
Robert J. Braun
Srdjan Ilic
Mauro Diodà
Paolo Tosi
Marco Gobbo
Umberto Martini
Assignee (at issue)
MEMC Electronic Materials, Inc.

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Quick Facts
Patent No.
US 5,942,032
App. No.
08/904,943
Filed
1997-08-01
Granted
1999-08-24
Kind
A