Granted Patent
Utility
US 5,954,887 · App. 09/098,987
Cleaning processing method of a film forming apparatus
Inventor:
Tatsuo Hatano
Patented Case
View Patent ↗
Granted: Sep 21, 1999
Filed: Jun 17, 1998
Inventor
Tatsuo Hatano
Assignee (at issue)
Tokyo Electron Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.