IP Library › Granted Patent US 5,958,139
Granted Patent Utility
US 5,958,139 · App. 08/850,224

Plasma etch system

Inventors: Vladimir E. Leibovich, Martin L. Zucker
Patented Case View Patent ↗
Granted: Sep 28, 1999 Filed: May 2, 1997
Inventors
Vladimir E. Leibovich
Martin L. Zucker
Assignee (at issue)
TEGAL CORPORATION

This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.

Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 5,958,139
App. No.
08/850,224
Filed
1997-05-02
Granted
1999-09-28
Kind
A