Granted Patent
Utility
US 5,963,027 · App. 08/870,397
Probe station having environment control chambers with orthogonally flexible lateral wall assembly
Inventor:
Ron A. Peters
Patented Case
View Patent ↗
Granted: Oct 5, 1999
Filed: Jun 6, 1997
Inventor
Ron A. Peters
Assignee (at issue)
Cascade Microtech, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.