IP Library Granted Patent US 5,966,202
Granted Patent Utility
US 5,966,202 · App. 08/829,099

Adjustable slit

Inventor: Andrew W. McCullough
Patented Case View Patent ↗
Granted: Oct 12, 1999 Filed: Mar 31, 1997
Inventor
Andrew W. McCullough
Assignee (at issue)
SVG Lithography Systems, Inc.

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Quick Facts
Patent No.
US 5,966,202
App. No.
08/829,099
Filed
1997-03-31
Granted
1999-10-12
Kind
A