Granted Patent
Utility
US 5,966,216 · App. 08/793,069
On-axix mask and wafer alignment system
Inventors:
Daniel N. Galburt, David M. Williamson
Patented Case
View Patent ↗
Granted: Oct 12, 1999
Filed: Feb 14, 1997
Inventors
Daniel N. Galburt
David M. Williamson
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.