Granted Patent
Utility
US 5,970,364 · App. 09/048,697
Method of nitride-sealed oxide-buffered local oxidation of silicon
Inventors:
Hsiu-Wen Huang, Gary Hong
Patented Case
View Patent ↗
Granted: Oct 19, 1999
Filed: Mar 26, 1998
Inventors
Hsiu-Wen Huang
Gary Hong
Assignee (at issue)
United Semicondutor Circuit Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.