Granted Patent
Utility
US 5,973,764 · App. 08/878,633
Vacuum assisted debris removal system
Inventors:
Andrew W. McCullough, Sean Olson
Patented Case
View Patent ↗
Granted: Oct 26, 1999
Filed: Jun 19, 1997
Inventors
Andrew W. McCullough
Sean Olson
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.