IP Library › Granted Patent US 5,976,620
Granted Patent Utility
US 5,976,620 · App. 08/969,273

Coating solution applying method and apparatus

Inventors: Masakazu Sanada, Minobu Matsunaga
Patented Case View Patent ↗
Granted: Nov 2, 1999 Filed: Nov 13, 1997
Inventors
Masakazu Sanada
Minobu Matsunaga
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.

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Quick Facts
Patent No.
US 5,976,620
App. No.
08/969,273
Filed
1997-11-13
Granted
1999-11-02
Kind
A