IP Library › Granted Patent US 5,985,094
Granted Patent Utility
US 5,985,094 · App. 09/076,397

Semiconductor wafer carrier

Inventor: Joseph O. Mosca
Patented Case View Patent ↗
Granted: Nov 16, 1999 Filed: May 12, 1998
Inventor
Joseph O. Mosca
Assignee (at issue)
SpeedFam-IPEC Corporation

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Quick Facts
Patent No.
US 5,985,094
App. No.
09/076,397
Filed
1998-05-12
Granted
1999-11-16
Kind
A