Granted Patent
Utility
US 5,990,473 · App. 09/018,456
Apparatus and method for sensing motion in a microelectro-mechanical system
Inventors:
Fred M. Dickey, Scott C. Holswade
Patented Case
View Patent ↗
Granted: Nov 23, 1999
Filed: Feb 4, 1998
Inventors
Fred M. Dickey
Scott C. Holswade
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.