IP Library › Granted Patent US 5,992,431
Granted Patent Utility
US 5,992,431 · App. 09/056,586

Device for treating substrates in a fluid container

Inventors: Martin Weber, John Oshinowo
Patented Case View Patent ↗
Granted: Nov 30, 1999 Filed: Apr 7, 1998
Inventors
Martin Weber
John Oshinowo
Assignee (at issue)
Steag Micro Tech GmbH

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Quick Facts
Patent No.
US 5,992,431
App. No.
09/056,586
Filed
1998-04-07
Granted
1999-11-30
Kind
A