Granted Patent
Utility
US 5,994,215 · App. 09/009,198
Method for suppression pattern distortion associated with BPSG reflow
Inventors:
Jeffrey P. Gambino, Son V. Nguyen
Patented Case
View Patent ↗
Granted: Nov 30, 1999
Filed: Jan 20, 1998
Inventors
Jeffrey P. Gambino
Son V. Nguyen
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.