Granted Patent
Utility
US 5,998,298 · App. 09/067,614
Use of chemical-mechanical polishing for fabricating photonic bandgap structures
Inventors:
James G. Fleming, Shawn-Yu Lin, Dale L. Hetherington, Bradley K. Smith
Patented Case
View Patent ↗
Granted: Dec 7, 1999
Filed: Apr 28, 1998
Inventors
James G. Fleming
Shawn-Yu Lin
Dale L. Hetherington
Bradley K. Smith
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.