Granted Patent
Utility
US 5,998,522 · App. 09/042,668
Coating solution and method for preparing the coating solution, method for forming insulating films for semiconductor devices, and method for evaluating the coating solution
Inventors:
Tadashi Nakano, Makoto Shimura, Tomohiro Ohta
Patented Case
View Patent ↗
Granted: Dec 7, 1999
Filed: Mar 17, 1998
Inventors
Tadashi Nakano
Makoto Shimura
Tomohiro Ohta
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.