Granted Patent
Utility
US 6,001,736 · App. 08/610,341
Method of manufacturing semiconductor device and an apparatus for manufacturing the same
Inventors:
Eiichi Kondo, Nobuyuki Takeyasu, Tomohiro Ohta, Yumiko Kawano, Takeshi Kaizuka, Shinpei Jinnouchi
Patented Case
View Patent ↗
Granted: Dec 14, 1999
Filed: Mar 4, 1996
Inventors
Eiichi Kondo
Nobuyuki Takeyasu
Tomohiro Ohta
Yumiko Kawano
Takeshi Kaizuka
Shinpei Jinnouchi
Assignees (at issue)
Kawasaki Steel Corporation
Tokyo Electron Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.