Granted Patent
Utility
US 6,010,959 · App. 09/152,729
Method of improving photoresist adhesion on a dielectric layer
Inventors:
John C. Sardella, Alexander Kalnitsky, Charles R. Spinner, III, Robert Carlton Foulks, Sr.
Patented Case
View Patent ↗
Granted: Jan 4, 2000
Filed: Sep 14, 1998
Inventors
John C. Sardella
Alexander Kalnitsky
Charles R. Spinner, III
Robert Carlton Foulks, Sr.
Assignee (at issue)
STMICROELECTRONICS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.