Granted Patent
Utility
US 6,013,401 · App. 09/232,758
Method of controlling illumination field to reduce line width variation
Inventors:
Andrew W. McCullough, Pradeep K. Govil, Daniel N. Galburt, David Callan
Patented Case
View Patent ↗
Granted: Jan 11, 2000
Filed: Jan 15, 1999
Inventors
Andrew W. McCullough
Pradeep K. Govil
Daniel N. Galburt
David Callan
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.