Granted Patent
Utility
US 6,013,954 · App. 08/828,669
Semiconductor wafer having distortion-free alignment regions
Inventor:
Tomohiro Hamajima
Patented Case
View Patent ↗
Granted: Jan 11, 2000
Filed: Mar 31, 1997
Inventor
Tomohiro Hamajima
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.