Granted Patent
Utility
US 6,020,237 · App. 09/018,775
Method of reducing dielectric damage due to charging in the fabrication of stacked gate structures
Inventors:
Ritu Shrivastava, Chitranjan N. Reddy
Patented Case
View Patent ↗
Granted: Feb 1, 2000
Filed: Feb 4, 1998
Inventors
Ritu Shrivastava
Chitranjan N. Reddy
Assignee (at issue)
Alliance Semiconductor Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.