Granted Patent
Utility
US 6,022,414 · App. 08/892,469
Single body injector and method for delivering gases to a surface
Inventors:
Adam Q. Miller, Daniel Dobkin
Patented Case
View Patent ↗
Granted: Feb 8, 2000
Filed: Jul 14, 1997
Inventors
Adam Q. Miller
Daniel Dobkin
Assignee (at issue)
Semiconductor Equipment GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.