Granted Patent
Utility
US 6,022,417 · App. 08/981,930
Support for wafer-shaped objects, in particular silicon wafers
Inventor:
Franz Sumnitsch
Patented Case
View Patent ↗
Granted: Feb 8, 2000
Filed: Feb 18, 1998
Inventor
Franz Sumnitsch
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.