Granted Patent
Utility
US 6,027,660 · App. 09/075,625
Method of etching ceramics of alumina/TiC with high density plasma
Inventors:
Richard Hsiao, Cherngye Hwang, Son V. Nguyen, Diana Perez
Patented Case
View Patent ↗
Granted: Feb 22, 2000
Filed: May 11, 1998
Inventors
Richard Hsiao
Cherngye Hwang
Son V. Nguyen
Diana Perez
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.