Granted Patent
Utility
US 6,033,988 · App. 09/014,091
Film forming methods
Inventor:
Shinji Hirano
Patented Case
View Patent ↗
Granted: Mar 7, 2000
Filed: Jan 27, 1998
Inventor
Shinji Hirano
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.