Granted Patent
Utility
US 6,036,587 · App. 08/728,688
Carrier head with layer of conformable material for a chemical mechanical polishing system
Inventors:
Robert D. Tolles, Tsungan Cheng, John Prince
Patented Case
View Patent ↗
Granted: Mar 14, 2000
Filed: Oct 10, 1996
Inventors
Robert D. Tolles
Tsungan Cheng
John Prince
Assignee (at issue)
Applied Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.