Granted Patent
Utility
US 6,051,066 · App. 09/059,883
End effector assembly for inclusion in a system for producing uniform deposits on a wafer
Inventor:
Robert George Begin
Patented Case
View Patent ↗
Granted: Apr 18, 2000
Filed: Apr 14, 1998
Inventor
Robert George Begin
Assignee (at issue)
Sputtered Films, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.