Granted Patent
Utility
US 6,051,866 · App. 09/132,254
Microstructures and single mask, single-crystal process for fabrication thereof
Inventors:
Kevin A. Shaw, Z. Lisa Zhang, Noel C. MacDonald
Patented Case
View Patent ↗
Granted: Apr 18, 2000
Filed: Aug 11, 1998
Inventors
Kevin A. Shaw
Z. Lisa Zhang
Noel C. MacDonald
Assignee (at issue)
Cornell Research Foundation, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.