Granted Patent
Utility
US 6,053,982 · App. 08/706,069
Wafer support system
Inventors:
Michael Halpin, Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd, Loren Jacobs
Patented Case
View Patent ↗
Granted: Apr 25, 2000
Filed: Aug 30, 1996
Inventors
Michael Halpin
Mark Hawkins
Derrick W. Foster
Robert Vyne
John F. Wengert
Cornelius A. van der Jeugd
Loren Jacobs
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.