Granted Patent
Utility
US 6,056,824 · App. 09/185,180
Free floating shield and semiconductor processing system
Inventors:
Lawrence D. Bartholomew, Jay DeDontney, Christopher A. Peabody
Patented Case
View Patent ↗
Granted: May 2, 2000
Filed: Nov 3, 1998
Inventors
Lawrence D. Bartholomew
Jay DeDontney
Christopher A. Peabody
Assignee (at issue)
Silicon Valley Group, Thermal Systems LLP
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.