Granted Patent
Utility
US 6,056,825 · App. 09/098,507
Rotary chuck including pins for lifting wafers
Inventor:
Franz Sumnitsch
Patented Case
View Patent ↗
Granted: May 2, 2000
Filed: Jun 17, 1998
Inventor
Franz Sumnitsch
Assignee (at issue)
SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.