Granted Patent
Utility
US 6,059,295 · App. 09/108,899
Flexible seal for a laser system
Inventor:
Paul St. Mark Shadforth Thompson
Patented Case
View Patent ↗
Granted: May 9, 2000
Filed: Jul 1, 1998
Inventor
Paul St. Mark Shadforth Thompson
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.