Granted Patent
Utility
US 6,060,395 · App. 09/138,450
Planarization method using a slurry including a dispersant
Inventors:
John Skrovan, Karl M. Robinson
Patented Case
View Patent ↗
Granted: May 9, 2000
Filed: Aug 21, 1998
Inventors
John Skrovan
Karl M. Robinson
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.